Sensors & Probes

The Microflown sensor is a MEMS based transducer able to measure acoustic particle velocity. The very small sized elements are created on silicon wafers using clean room technology. The sensing element consists of two ultra-thin wires (thinner than a strand of human hair). These wires are platinum resistors that act as temperature sensors. They are powered by an electrical current which causes them to heat up. Local temperature variations cause changes in the wires resistance. When the acoustic particle velocity (sound) propagates across the wires, it asymmetrically alters the temperature distribution around the resistors (wires). The resulting resistance difference provides a broad band (20 Hz up to at least 10 kHz) signal with a figure-of-eight directivity that is proportional to the acoustic particle velocity.